Gla-Taylor lens
193nm Glan-Taylor prisms are high extinction ratio polarizers specifically designed for ArF excimer lasers (DUV deep ultraviolet), featuring a birefringent crystal combined with an air-gap/cemented structure. They achieve total internal reflection separation of the o-ray and high-transmission output of the e-ray at the 193nm wavelength, serving as critical polarization components in semiconductor lithography, laser medical, and deep ultraviolet precision measurement applications. They address the issues of deep ultraviolet polarization state mismatch and high-energy damage, ensuring polarization purity, optical energy utilization, and long-term stable operation. Unlike visible-light Glan prisms, these must simultaneously achieve high transmission/low absorption at 193nm, ultra-high laser damage threshold, and precise narrow-wavelength matching, imposing extremely stringent requirements on both materials and manufacturing processes.
